EET320 Semiconductor Processing

This course provides a broad look at the current state of Microelectronic & Silicon Manufacturing. Students will learn about different fabrication steps such as silicon wafer growth, oxidation, diffusion, ion implantation, rapid thermal processing as well as photo-resist and optical photo-lithography. Various processing techniques are discussed such as vacuum science and plasma process, wet and dry etch processes, evaporation and sputtering process, thin film deposition and CWD (Chemical wafer deposition) process. Upon successful course completion, the students will have a basic understanding of semiconductor manufacturing processes.

Prerequisite: EET121